A ceramic ring with ladder structure
A ceramic ring for supporting a wafer, comprising: a body; and an annular recess provided in the center of the body, the annular recess having a bottom surface and a buffer portion extending upwards from the bottom surface to the surface of the body. The ceramic ring can ensure reliability in positi...
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Main Authors | , , |
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Format | Patent |
Language | Chinese English |
Published |
01.11.2017
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Subjects | |
Online Access | Get full text |
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Summary: | A ceramic ring for supporting a wafer, comprising: a body; and an annular recess provided in the center of the body, the annular recess having a bottom surface and a buffer portion extending upwards from the bottom surface to the surface of the body. The ceramic ring can ensure reliability in positioning the wafer, and can prevent the edge side of the wafer from generating particles by contacting the ceramic ring. |
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Bibliography: | Application Number: TW20165133202 |