Apparatus and system for thermally processing substrates and apparatus for combining pulses of electromagnetic energy

An optical system that is able to reliably deliver a uniform amount of energy across an anneal region contained on a surface of a substrate. The optical system is adapted to deliver, or project, a uniform amount of energy having a desired two-dimensional shape on a desired region on the surface of t...

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Main Authors LI, JIPING, HUNTER, AARON MUIR, HOWELLS, SAMUEL C, HOLMGREN, DOUGLAS E, TONG, EDRIC, ADAMS, BRUCE E, MOFFATT, STEPHEN
Format Patent
LanguageChinese
English
Published 21.09.2017
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:An optical system that is able to reliably deliver a uniform amount of energy across an anneal region contained on a surface of a substrate. The optical system is adapted to deliver, or project, a uniform amount of energy having a desired two-dimensional shape on a desired region on the surface of the substrate. An energy source for the optical system is typically a plurality of lasers, which are combined to form the energy field.
Bibliography:Application Number: TW20165115758