Vertical gate all around (vgaa) devices and methods of manufacturing the same

• Main Authors: CHANG, CHIAHAO, WANG, CHINCHI, CHEN, CHENGLONG, LIU, CHIWEN, SHIEH, MINGSHAN, LIEN, WAIYI, WANG, CHIHHAO
• Format: Patent
• Language: Chinese; English
• Published: 11.08.2017
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

Vertical gate all around (VGAA) devices and methods of manufacture thereof are described. A method for manufacturing a VGAA device includes: exposing a top surface and sidewalls of a first portion of a protrusion extending from a doped region, wherein a second portion of the protrusion is surrounded...