ELECTRON MICROSCOPE
An electron microscope includes a charged particle beam generator, a detector, a film and a bearing unit. The charged particle beam generator generates a first charged particle beam to bomb an object. The detector detects a second charged particle from the object to form an image. The film disposes...
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Main Authors | , , , , , , , , , , |
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Format | Patent |
Language | Chinese English |
Published |
01.08.2017
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Subjects | |
Online Access | Get full text |
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