ELECTRON MICROSCOPE

• Main Authors: TSENG, YING-SHUO, LIU, SHIH-YI, CHEN, I-JIUN, YANG, LIIAO, HUANG, TSU-WEI, CHEN, FU-RONG, FANG, JIAN-MIN, CHEN, CHIH-WEI, HUANG, YU-SHAN, LIN, HSIN-YU, HSU, CHIN-LIANG
• Format: Patent
• Language: Chinese; English
• Published: 01.08.2017
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS; ELECTRICITY

An electron microscope includes a charged particle beam generator, a detector, a film and a bearing unit. The charged particle beam generator generates a first charged particle beam to bomb an object. The detector detects a second charged particle from the object to form an image. The film disposes on downstream of charged particle beam generator and has a first surface and a second surface. A space between charged particle beam generator and the first surface of film is a vacuum environment. The bearing unit disposes at a side of second surface of film and has a bearing surface and a back surface. The object disposes on the bearing surface of the bearing unit and a distance between an analyzed surface of the object and the film is less than a predetermined spacing. A liquid space exists between the analyzed surface and the film to be filled a liquid.