Methods for preparing a melt of silicon powder for silicon crystal growth

Methods for preparing a melt from silicon powder for use in growing a single crystal or polycrystalline silicon ingot in accordance with the Czochralski method that include removal of silicon oxides from the powder; application of a vacuum to remove air and other oxidizing gases; controlling the pos...

Full description

Saved in:
Bibliographic Details
Main Authors MASSOUD, JAVIDI, KIMBEL, STEVEN L
Format Patent
LanguageChinese
English
Published 01.03.2014
Subjects
Online AccessGet full text

Cover

Loading…
More Information
Summary:Methods for preparing a melt from silicon powder for use in growing a single crystal or polycrystalline silicon ingot in accordance with the Czochralski method that include removal of silicon oxides from the powder; application of a vacuum to remove air and other oxidizing gases; controlling the position of the charge relative to the heater during and after melting of the powder and maintaining the charge above its melting temperature for a period of time to allow oxides to dissolve; and use of a removable spacer between the crucible sidewall and the silicon powder charge to reduce oxides and silicon bridging.
Bibliography:Application Number: TW200998137653