Nitride semiconductor stacked structure and semiconductor optical device, and methods for manufacturing the same

• Main Authors: NOBUYUKI TOMITA, MASAYOSHI TAKEMI, AKIHITO OHNO
• Format: Patent
• Language: Chinese; English
• Published: 21.02.2013
• Subjects: BASIC ELECTRIC ELEMENTS; DEVICES USING STIMULATED EMISSION; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; NANOTECHNOLOGY; PERFORMING OPERATIONS; SEMICONDUCTOR DEVICES; SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; TRANSPORTING