Approach and apparatus for etching a substrate in an etching fluid
The invention relates to a method for etching substrates (4) received in an etching solution (2). Said method comprises the following steps: A basin (1) which can receive the etching solution (2) is prepared, the substrate (4) is completely immersed in the etching solution (2), a flow which surround...
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Main Authors | , , , |
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Format | Patent |
Language | Chinese English |
Published |
01.08.2009
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Subjects | |
Online Access | Get full text |
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Summary: | The invention relates to a method for etching substrates (4) received in an etching solution (2). Said method comprises the following steps: A basin (1) which can receive the etching solution (2) is prepared, the substrate (4) is completely immersed in the etching solution (2), a flow which surrounds the substrate (4) is produced and the speed and/or direction of the flow can be periodically altered. |
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Bibliography: | Application Number: TW200594143415 |