Ito thin-film polishing apparatus for OLED
The present invention relates to a polishing apparatus for polishing glass substrate coated with ITO film, which includes a bottom ejection plate attached with an abrasive pad, a rotation driving device for driving the bottom ejection plate to rotate; a top ejection plate corresponding to the bottom...
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Main Authors | , , |
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Format | Patent |
Language | English |
Published |
21.01.2007
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Online Access | Get full text |
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Summary: | The present invention relates to a polishing apparatus for polishing glass substrate coated with ITO film, which includes a bottom ejection plate attached with an abrasive pad, a rotation driving device for driving the bottom ejection plate to rotate; a top ejection plate corresponding to the bottom ejection plate and having an abrasive seat disposed on the bottom side thereof for accommodating abrasive material; a cylinder used for the vertically moving top ejection plate to push the top ejection plate downwards and contact with the bottom ejection plate, a gyration driving device connected with the cylinder and driving the top ejection plate to revolve, an abrasive liquid supply device for supplying abrasive liquid to the bottom ejection plate, a rotation control device for controlling the rotation driving device to rotate, a pressure control device for controlling he cylinder to move up and down and exerting pressure, and a gyration control device for controlling the gyration driving device to rotate. The polishing apparatus of the present invention is employed to polish a glass substrate surface coated with ITO film, thereby gaining low light illumination. |
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Bibliography: | Application Number: TW200594128278 |