Substrate delivering device

The present invention is to provide a substrate delivering device, comprising a base, a floating mechanism, two moving sets, a plurality of guiding wheels, a lifting piece, and a delivery frame, wherein: the floating mechanism has an air compressor and a pad for supporting a substrate, the pad havin...

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Bibliographic Details
Main Authors WU, SHENG-SZ, LAN, GUOI, SHIU, SHIANG-JEN, TSAI, CHING-HUA
Format Patent
LanguageEnglish
Published 01.01.2007
Edition7
Subjects
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Summary:The present invention is to provide a substrate delivering device, comprising a base, a floating mechanism, two moving sets, a plurality of guiding wheels, a lifting piece, and a delivery frame, wherein: the floating mechanism has an air compressor and a pad for supporting a substrate, the pad having a plurality of pores communicated with the air compressor; the two moving sets are slidingly disposed to the base and two sides of the pad; the guiding wheels are pivoted to the two moving set; the lifting piece is connected to the base and the moving set; the delivery frame is sleeved to the base and across the pad in a transverse manner; and the delivery frame may support the guiding wheels by its two ends. Accordingly, the substrate delivering device may be used to deliver fragile substrates, and the substrates are free from scratches or damage due to the non-direct contact between the guiding wheels and the substrates.
Bibliography:Application Number: TW20050132488