Automated sorter system and method thereof

A system and method for automated sorter operations including a storage device and a sorting module. The storage device stores multiple process records, each record including an identity and a current status. The sorting module receives a wafer lot identity and acquires the current status from the p...

Full description

Saved in:
Bibliographic Details
Main Authors HSU, HSIEN-JUNG, CHEN, IUN, JANN, LARRY, WANG, MING, CHOU, JOE
Format Patent
LanguageEnglish
Published 21.04.2006
Edition7
Subjects
BASIC ELECTRIC ELEMENTS
CALCULATING
CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION ORPROCESSING OF GOODS
COMPUTING
CONTROL OR REGULATING SYSTEMS IN GENERAL
CONTROLLING
COUNTING
ELECTRIC DIGITAL DATA PROCESSING
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
FUNCTIONAL ELEMENTS OF SUCH SYSTEMS
GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC
GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS
MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS
PHYSICS
REGULATING
SEMICONDUCTOR DEVICES
TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINSTCLIMATE CHANGE
Online AccessGet full text

Cover

More Information
Summary:A system and method for automated sorter operations including a storage device and a sorting module. The storage device stores multiple process records, each record including an identity and a current status. The sorting module receives a wafer lot identity and acquires the current status from the process record accordingly. The sorting module issues a first status setting instruction to a manufacturing execution system (MES) to release the wafer lot, issue a flow instruction with sorting recipes directing the MES to perform a sorter operation, and issues a second status setting instruction to the MES to hold or bank the wafer lot.
Bibliography:Application Number: TW20040132525