A five-axis coplanar micro-actuated platform of nano-scale precision

• Main Authors: JYWE, WEN-YUH, WU, CHIA-HONG, DENG, YUN-FENG
• Format: Patent
• Language: English
• Published: 01.09.2005
• Edition: 7
• Subjects: COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOTDIRECTED TO A PARTICULAR RESULT; DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g.ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OFPARTICULAR DETAILS OR COMPONENTS; METAL-WORKING NOT OTHERWISE PROVIDED FOR; PERFORMING OPERATIONS; TRANSPORTING

This invention provides a five-axis coplanar micro-actuated platform of nano-scale precision, including a base, a platform, a mounting pedestal, a number of actuators, and a number of first-type and second-type flexible bodies. The first-type flexibly body is axial-action type; namely, its input action and output action are in the same axis direction; while the second-type flexibly body is perpendicular-action type; namely its output action is in perpendicular to input action direction. The platform is mounted on the mounting pedestal at the center, and the mounting pedestal is connected to four actuators through the first-type bodies, two in X direction and two in Y direction. Four second-type flexible bodies are mounted at the four corners of the base to support the platform; each of the input end is attached to an actuator, and the output end is vertically attached to the platform. Through this design, the platform is mounted and supported on flexible bodies to form a five-axis micro-actuated mechanism with an increased positioning precision.