Polishing composition

A polishing composition comprising silica particles, water, and Fe salt and/or Al salt of a polyaminocarboxylic acid; a polishing process comprising applying the polishing composition; a process for manufacturing a magnetic disk substrate, comprising the step of polishing a substrate with the polish...

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Bibliographic Details
Main Authors FUJII, SHIGEO, HAGIHARA, TOSHIYA, NAITO, KOICHI
Format Patent
LanguageEnglish
Published 21.02.2005
Edition7
Subjects
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Summary:A polishing composition comprising silica particles, water, and Fe salt and/or Al salt of a polyaminocarboxylic acid; a polishing process comprising applying the polishing composition; a process for manufacturing a magnetic disk substrate, comprising the step of polishing a substrate with the polishing composition; a magnetic disk substrate manufactured by applying the polishing composition.
Bibliography:Application Number: TW20010102281