Polishing composition
A polishing composition comprising silica particles, water, and Fe salt and/or Al salt of a polyaminocarboxylic acid; a polishing process comprising applying the polishing composition; a process for manufacturing a magnetic disk substrate, comprising the step of polishing a substrate with the polish...
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Main Authors | , , |
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Format | Patent |
Language | English |
Published |
21.02.2005
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Edition | 7 |
Subjects | |
Online Access | Get full text |
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Summary: | A polishing composition comprising silica particles, water, and Fe salt and/or Al salt of a polyaminocarboxylic acid; a polishing process comprising applying the polishing composition; a process for manufacturing a magnetic disk substrate, comprising the step of polishing a substrate with the polishing composition; a magnetic disk substrate manufactured by applying the polishing composition. |
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Bibliography: | Application Number: TW20010102281 |