Detecting device for chemical matter and detecting method for chemical matter

The invented detecting device (100) for chemical matter is equipped with a vacuum UV lamp (3), which is used to ionize the to-be-detected target chemical matter in the exhaust Gs. The ionized to-be-detected target chemical matter is isolated by an ion capture device (10) with high frequency electric...

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Bibliographic Details
Main Authors TSURUGA, SHIGENORI, KURIBAYASHI, SHIZUMA, YAMAKOSHI, HIDEO, FUTAMI, HIROSHI, DANNO, MINORU
Format Patent
LanguageEnglish
Published 11.10.2004
Edition7
Subjects
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Summary:The invented detecting device (100) for chemical matter is equipped with a vacuum UV lamp (3), which is used to ionize the to-be-detected target chemical matter in the exhaust Gs. The ionized to-be-detected target chemical matter is isolated by an ion capture device (10) with high frequency electric field formed therein. The ion group in the ion capture device (10) is provided with energy by SWIFT waveform (which comprises frequency component excluding the frequency corresponding to the orbit resonance frequency of the to-be-detected target chemical matter ion) and impurities are removed. Furthermore, the above-mentioned ion group is provided with energy by TICKLE waveform (which comprises frequency component corresponding to the orbit resonance frequency of the to-be-detected target chemical matter ion) and the to-be-detected target chemical matter ion is segmented. Therefore, the mass of the segment is determined by a mass analyzer (4) to identify the to-be-detected target chemical matter.
Bibliography:Application Number: TW200392117658