Dynamic film thickness control device/method and ITS coating method
A dynamic film thickness control system/method and its coating method consisting of a minimum of one mask plate arranged between a substrate and a vapor source. A film thickness control device is utilized for real-time control over deposited film thickness and gradually moves the mask plate accordin...
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Main Authors | , |
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Format | Patent |
Language | English |
Published |
11.06.2004
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Edition | 7 |
Subjects | |
Online Access | Get full text |
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Abstract | A dynamic film thickness control system/method and its coating method consisting of a minimum of one mask plate arranged between a substrate and a vapor source. A film thickness control device is utilized for real-time control over deposited film thickness and gradually moves the mask plate according to the film thickness control value acquired by the film thickness control device, enabling the mask plate to mask film zones on the said substrate to achieve the film thickness of a design objective. When the required zones of deposition are masked, the deposition of a particular film layer is completed. |
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AbstractList | A dynamic film thickness control system/method and its coating method consisting of a minimum of one mask plate arranged between a substrate and a vapor source. A film thickness control device is utilized for real-time control over deposited film thickness and gradually moves the mask plate according to the film thickness control value acquired by the film thickness control device, enabling the mask plate to mask film zones on the said substrate to achieve the film thickness of a design objective. When the required zones of deposition are masked, the deposition of a particular film layer is completed. |
Author | LING, GUO-JI JUANG, JIUN-SHIU |
Author_xml | – fullname: JUANG, JIUN-SHIU – fullname: LING, GUO-JI |
BookMark | eNrjYmDJy89L5WRwdqnMS8zNTFZIy8zJVSjJyEzOzkstLlZIzs8rKcrPUUhJLctMTtXPTS3JyE9RSMxLUfAMCQbKJpZk5qUrQIR5GFjTEnOKU3mhNDeDvJtriLOHbmpBfnxqcUFicmpeakl8SLippaGRgZGTkzFhFQCtDjNH |
ContentType | Patent |
DBID | EVB |
DatabaseName | esp@cenet |
DatabaseTitleList | |
Database_xml | – sequence: 1 dbid: EVB name: esp@cenet url: http://worldwide.espacenet.com/singleLineSearch?locale=en_EP sourceTypes: Open Access Repository |
DeliveryMethod | fulltext_linktorsrc |
Discipline | Medicine Chemistry Sciences Physics |
Edition | 7 |
ExternalDocumentID | TW591202BB |
GroupedDBID | EVB |
ID | FETCH-epo_espacenet_TW591202BB3 |
IEDL.DBID | EVB |
IngestDate | Fri Jul 19 13:57:48 EDT 2024 |
IsOpenAccess | true |
IsPeerReviewed | false |
IsScholarly | false |
Language | English |
LinkModel | DirectLink |
MergedId | FETCHMERGED-epo_espacenet_TW591202BB3 |
Notes | Application Number: TW200190126544 |
OpenAccessLink | https://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20040611&DB=EPODOC&CC=TW&NR=591202B |
ParticipantIDs | epo_espacenet_TW591202BB |
PublicationCentury | 2000 |
PublicationDate | 20040611 |
PublicationDateYYYYMMDD | 2004-06-11 |
PublicationDate_xml | – month: 06 year: 2004 text: 20040611 day: 11 |
PublicationDecade | 2000 |
PublicationYear | 2004 |
RelatedCompanies | HERMOSA THIN FILM CO., LTD |
RelatedCompanies_xml | – name: HERMOSA THIN FILM CO., LTD |
Score | 2.6012495 |
Snippet | A dynamic film thickness control system/method and its coating method consisting of a minimum of one mask plate arranged between a substrate and a vapor... |
SourceID | epo |
SourceType | Open Access Repository |
SubjectTerms | CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS METALLURGY PHYSICS SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION TESTING |
Title | Dynamic film thickness control device/method and ITS coating method |
URI | https://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20040611&DB=EPODOC&locale=&CC=TW&NR=591202B |
hasFullText | 1 |
inHoldings | 1 |
isFullTextHit | |
isPrint | |
link | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwdV1LS8NAEB5qfd40KvW9B8kt1HST1ByCkBdV6AONtreySTZS1LSYiH_f2U2iXnqdgWEYmOd-OwNwnWHgZZRzrZdRphm2iINmzLDnMeK-lZmUyVH2cGQNno2HmTlrwWvzF0buCf2WyxHRoxL091LG69XfEMuX2MqiGy-QtLwLI8dXm-5YpCdd9V0nmIz9sad6nhNN1dGjY9o6tvnuBmyKGlos2Q9eXPElZfU_n4T7sDVBUXl5AC2eK7DrNWfXFNgZ1q_dCmxLeGZSILF2weIQPL-6IU-yxfsHEWj1NxGtSI05JykXvt-tLkMTlqfkPnpCLhP4ZlKRj-AqDCJvoKFe818LzKNprb9Lj6GdL3PeAUJZQm3MQDQxDOyS9Lif9W4tW08NhkVdcnMCnXVSTtezzmCvAqdYmq6fQ7v8_OIXmHfL-FLa7AfV4ogF |
link.rule.ids | 230,309,786,891,25594,76903 |
linkProvider | European Patent Office |
linkToHtml | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwdV1LT8JAEJ4gPvCmqMEnezC9NVi2D3toTNpCQGkhWoUb2b4MUQuxNf59Z7dFvXCdTSaTSWa-_Xa_3QG4TrHxMpokcjelTFZN3ge1kCHnUUNDTzXKxFG25-uDZ_V-ps1q8Lp-CyP-Cf0WnyNiRUVY74Xo16u_QyxXaCvzTrhA0_KuH1iutGbHHJ4UybWt3mTsjh3JcaxgKvmPlmYqSPPtLdg2kA8KnvRi8ycpq_940j-AnQm6yopDqCVZExrOeuxaE_a86ra7CbtCnhnlaKxKMD8Cxy1nyJN08f5BuFr9jXcrUmnOSZzw2u-Uk6EJy2IyDJ5wlXF9MynNx9Du9wJnIGNc898MzINpFb9NT6CeLbOkBYSyiJqIQDRSVWRJSmik3VvdVGKV4aYuujmF1iYvZ5uX2tAYBN5oPhr6D-ewXwpVdFlRLqBefH4ll4jBRXgl8vcDV3uK7w |
openUrl | ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Apatent&rft.title=Dynamic+film+thickness+control+device%2Fmethod+and+ITS+coating+method&rft.inventor=JUANG%2C+JIUN-SHIU&rft.inventor=LING%2C+GUO-JI&rft.date=2004-06-11&rft.externalDBID=B&rft.externalDocID=TW591202BB |