Filtration device

In conventional arts, there has been no effective method for filtering the drainage occurred in mechanical processes, such as CMP. This is due to that the drainage is under a colloid solution state since the grinding particles contained within the CMP slurry are fine particles. In the present invent...

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Bibliographic Details
Main Authors IINUMA, HIROFUMI, TSUIHIJI, MOTOYUKI, UMEZAWA, HIROYUKI, ISEKI, MASAHIRO
Format Patent
LanguageEnglish
Published 11.01.2004
Edition7
Subjects
BASIC ELECTRIC ELEMENTS
CHEMISTRY
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
METALLURGY
PERFORMING OPERATIONS
PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
SEMICONDUCTOR DEVICES
SEPARATION
TRANSPORTING
TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
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Summary:In conventional arts, there has been no effective method for filtering the drainage occurred in mechanical processes, such as CMP. This is due to that the drainage is under a colloid solution state since the grinding particles contained within the CMP slurry are fine particles. In the present invention, which provides a filtration device, the drainage containing the fine particles of the colloid solution is introduced into a tank 50, circulated, and filtered by means of a second filter 2, which is construed by a gel film being disposed on the surface of a first filter 1 by suction. The suction pressure while filtering is extremely weakened in order to maintain filterability while delaying the blockage of the second filter 2. Further, the gel film of the second filter 2 sucked on the surface of a first filter 1 is capable of departing with ease while stopping the suction, and a filtration device capable of re-continuing the filtration is thus realized.
Bibliography:Application Number: TW200291123661