Manufacturing method to integrate spacer applied in liquid crystal display on the chip

• Main Authors: LI, JIUNI, LIAU, TZUNG-NENG, DAI, YUAN-DUNG
• Format: Patent
• Language: English
• Published: 01.10.2003
• Edition: 7
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

The present invention is a manufacturing method to integrate the spacer applied in liquid crystal display on the chip, which comprises using an opaque driving circuit formed on the transparent substrate as the pattern mask; proceeding an exposure step to the back side of the transparent substrate; forming a non-photosensitive area of a photoresist matrix at the front end of the photoresist; preparing a pattern mask different from the photoresist matrix pattern; proceeding an exposure developing step to the photoresist matrix, so that the interlaced positions of the matrix pattern and the pattern mask can form photoresist blocks respectively as the spacer. Thus, the spacer can be concentrated on the opaque area without precise alignment, so as to increase the image quality of the liquid crystal display.