Reflecting device of optical wafer present sensor system and application thereof

The present invention relates to a reflecting device of an optical wafer present sensor system and an application thereof. The present invention relates to an improvement of an optical wafer present sensor system in a semiconductor process. A reflecting device is provided to an optical wafer present...

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Bibliographic Details
Main Authors JUNG, GUO-JIN, CHEN, HE-REN, LI, DUNG-LI, LIU, FANG-LIN
Format Patent
LanguageEnglish
Published 01.04.2003
Edition7
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:The present invention relates to a reflecting device of an optical wafer present sensor system and an application thereof. The present invention relates to an improvement of an optical wafer present sensor system in a semiconductor process. A reflecting device is provided to an optical wafer present sensor system in a semiconductor process in order to reflect the incident light to the reflecting device to another direction so that the light receiver of the optical wafer present sensor system receives an insufficient amount of photo quantity in order to solve the problem of error judgment and increase the judgment accuracy of the sensor system.
Bibliography:Application Number: TW20010124454