Apparatus and method for dispersing spacers

• Main Authors: PARK, YOUNGUN, NAM, SHO-HAK, LEE, SOO-WON, SHIN, HYUN-KANG
• Format: Patent
• Language: English
• Published: 21.08.2002
• Edition: 7
• Subjects: BASIC ELECTRIC ELEMENTS; DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; FREQUENCY-CHANGING; NON-LINEAR OPTICS; OPTICAL ANALOGUE/DIGITAL CONVERTERS; OPTICAL LOGIC ELEMENTS; OPTICS; PHYSICS; SEMICONDUCTOR DEVICES; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF

Disclosed is a spacer dispersing apparatus and method. When a substrate on which a job is finished in a previous apparatus is arranged on a handling station, an apparatus controller compares information on the size of the substrates transferred from a host or an operator interface with information o...