Apparatus and method for dispersing spacers

• Main Authors: PARK, YOUNGUN, NAM, SHO-HAK, LEE, SOO-WON, SHIN, HYUN-KANG
• Format: Patent
• Language: English
• Published: 21.08.2002
• Edition: 7
• Subjects: BASIC ELECTRIC ELEMENTS; DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; FREQUENCY-CHANGING; NON-LINEAR OPTICS; OPTICAL ANALOGUE/DIGITAL CONVERTERS; OPTICAL LOGIC ELEMENTS; OPTICS; PHYSICS; SEMICONDUCTOR DEVICES; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF

Disclosed is a spacer dispersing apparatus and method. When a substrate on which a job is finished in a previous apparatus is arranged on a handling station, an apparatus controller compares information on the size of the substrates transferred from a host or an operator interface with information on the sizes of the substrates detected from a position sensor positioned on the handling station. When the information from these two sources is not identical, control is performed to output an alarm, and a size of a stage, on which spacers are dispersed on the substrates, is adjusted according to the information on the actual sizes of the substrates. The apparatus controller performs this operation of changing the size of the stage on which the substrates are loaded to correspond to the size of the substrates. Next, the apparatus controller controls a loading robot to load the substrates that are positioned on the handling station on loading regions of the stage, and drives a spacer dispersing unit to disperse the spacers on the substrates. Therefore, even with the changing of the size of the substrates, the spacers can be continuously dispersed without requiring the exchanging of the stages. Accordingly, job efficiency is improved.