Emitter, manufacture method of emitter, and manufacture method of cold electron emitting element

The cold electron emitting element of the present invention is formed by the emitter, the emitter is formed by etching the pole shape multiple crystal films which grown on the substrate along the crystal axis of the pole shape crystal grain. In the cold electron emitting element of the present inven...

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Bibliographic Details
Main Authors HIRANAKA, KOICHI, SATO, YASUYO, NORIKANE, TETSUYA, WADA, NAOKI
Format Patent
LanguageEnglish
Published 21.12.2001
Edition7
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
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Summary:The cold electron emitting element of the present invention is formed by the emitter, the emitter is formed by etching the pole shape multiple crystal films which grown on the substrate along the crystal axis of the pole shape crystal grain. In the cold electron emitting element of the present invention, even when a plurality of emitters are formed, the cold electron emitting element with uniform shape of the emitters, and with caused by the variation of the emitter shape be suppressed, and with uniform emitting character on a larger area, can be produced.
Bibliography:Application Number: TW200089112435