Pressure insensitive gas control system

A pressure insensitive gas process device that includes a gas sensor and restrictions upstream and downstream of the gas sensor. Gas process devices in which pressure insensitivity may be achieved include mass flow controllers as well as other types of devices. The restrictions result in pressure dr...

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Bibliographic Details
Main Authors SHERIFF, DAVID P, WANG, CHIUN
Format Patent
LanguageEnglish
Published 01.04.2001
Edition7
Subjects
BASIC ELECTRIC ELEMENTS
CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOIDCHEMISTRY
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
MEASURING
MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUIDLEVEL
METERING BY VOLUME
PERFORMING OPERATIONS
PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
PHYSICS
SEMICONDUCTOR DEVICES
TESTING
THEIR RELEVANT APPARATUS
TRANSPORTING
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Summary:A pressure insensitive gas process device that includes a gas sensor and restrictions upstream and downstream of the gas sensor. Gas process devices in which pressure insensitivity may be achieved include mass flow controllers as well as other types of devices. The restrictions result in pressure drops upstream and downstream of the gas sensor which shield the gas sensor from upstream and downstream pressure changes, respectively, rendering the gas sensor and entire gas process device insensitive to pressure changes.
Bibliography:Application Number: TW200089113822