Method and apparatus of removing a sample adsorbed by static electricity from the sample stage

This invention removes a sample, which is held on a sample stage (8) in a vacuum chamber, by means of an electrostatic adsorption voltage applied to the sample stage (8). The method includes a first step that pushes up a lift pin (18) to remove the sample from the sample stage (8) to a predetermined...

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Bibliographic Details
Main Authors ISHIMURA, HIROAKI, NAKATA, KENJI, SATOU, TAKASHI, TSUBAKI, TAKESHI, HIRANO, HIROYOSHI
Format Patent
LanguageEnglish
Published 11.06.2000
Edition7
Subjects
BASIC ELECTRIC ELEMENTS
COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOTDIRECTED TO A PARTICULAR RESULT
CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g.ARRANGEMENTS FOR COPYING OR CONTROLLING
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
GENERATION
MACHINE TOOLS
MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OFPARTICULAR DETAILS OR COMPONENTS
METAL-WORKING NOT OTHERWISE PROVIDED FOR
PERFORMING OPERATIONS
SEMICONDUCTOR DEVICES
TRANSPORTING
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Summary:This invention removes a sample, which is held on a sample stage (8) in a vacuum chamber, by means of an electrostatic adsorption voltage applied to the sample stage (8). The method includes a first step that pushes up a lift pin (18) to remove the sample from the sample stage (8) to a predetermined height. Then the lift pin (18) is made to stand still for a period of time after the termination of first step. The sample is removed from the sample stage due to the reaction force of the sample through repetition of first and second step.
Bibliography:Application Number: TW19980109949