Device and method for controlling the measurement of drops of spin-on glass

A device and method for controlling the measurement of drops of spin-on glass are disclosed. A weight detector is utilized to detect the change of weight of the spin-on glass solution so as to correctly determine the amount of each spin-on glass drop. A programmable logic controller is utilized to c...

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Bibliographic Details
Main Authors JANG, SHR-SHIUN, WANG, WEN-YI, LI, DUNG-LI, MA, YU-LUNG
Format Patent
LanguageEnglish
Published 21.04.2000
Edition7
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:A device and method for controlling the measurement of drops of spin-on glass are disclosed. A weight detector is utilized to detect the change of weight of the spin-on glass solution so as to correctly determine the amount of each spin-on glass drop. A programmable logic controller is utilized to control the detection operation. When it is detected that the amount of drop becomes insufficient, the programmable logic controller generates a warning signal and temporarily terminates the operation of the device to avoid producing defected wafers.
Bibliography:Application Number: TW19970104744