Semiconductor wafer testing apparatus equipped with optical character recognizer

• Main Authors: KIM, DONG-HO, KIM, YU-KWEON
• Format: Patent
• Language: Chinese; English
• Published: 01.01.1999
• Subjects: BASIC ELECTRIC ELEMENTS; CONVEYING; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; HANDLING THIN OR FILAMENTARY MATERIAL; MEASURING; MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES; PACKING; PERFORMING OPERATIONS; PHYSICS; PNEUMATIC TUBE CONVEYORS; SEMICONDUCTOR DEVICES; SHOP CONVEYOR SYSTEMS; STORING; TECHNICAL SUBJECTS COVERED BY FORMER USPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ARTCOLLECTIONS [XRACs] AND DIGESTS; TESTING; TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING; TRANSPORTING

A semiconductor wafer testing apparatus having a work table on which a carrier containing semiconductor wafers to be checked is placed, a microscope which makes enlarged images of the semiconductor wafers for inspection, a robot arm that conveys the semiconductor wafers in the carrier to the microscope^s stage, and a controller that has control over the operation of each part; the semiconductor wafer testing apparatus including a wafer flat zone aligner which has a pair of roller pins each coming in contact with circumferences of the wafers being stacked in the carrier through an open lower part of the carrier and rotating; and an optical character recognizer that moves up and down and forward and backward with respect to the carrier, and interposes between the wafers in the carrier so as to read out codes which are on each wafer.