Improved plastic member for micromechanical device

An improved plastic member for micromechanical device, which bends along with the movement of a component of the element, where the plastic member has the following improvements: a member formed by one or more conductive non-crystal alloy, being the regular formula of the alloy ALNy, (Al3Ti)Ny, (Al:...

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Bibliographic Details
Main Authors YOSHIHARA HEIKATSU, THOMAS W. ORENT, RICHARD L. KNIPE, JOHNSON, DEBORAH E
Format Patent
LanguageChinese
English
Published 11.07.1998
Subjects
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
PHYSICS
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Summary:An improved plastic member for micromechanical device, which bends along with the movement of a component of the element, where the plastic member has the following improvements: a member formed by one or more conductive non-crystal alloy, being the regular formula of the alloy ALNy, (Al3Ti)Ny, (Al:(Si,Ti)N or (Al;(Q, Z)Ny, where Q and Z are other elements.
Bibliography:Application Number: TW19960112726