Fabricating process for chip with fluoro-oxide

A fabricating process for chip with fluoro-oxide comprises the steps of: preparing one chip; growing one fluoro-oxide layer on the chip by depositing; putting the chip into one high thermal processor to perform oxidization to the fluoro-oxide by applying high temperature; fetching the chip.

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Bibliographic Details
Main Authors LU, WEI-SHIN, HWU, JENN-GWO
Format Patent
LanguageChinese
English
Published 01.03.1996
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:A fabricating process for chip with fluoro-oxide comprises the steps of: preparing one chip; growing one fluoro-oxide layer on the chip by depositing; putting the chip into one high thermal processor to perform oxidization to the fluoro-oxide by applying high temperature; fetching the chip.
Bibliography:Application Number: TW19950108012