Method for manufacturing multiple filters with Fabry-Perot cavity structure, multispectral transmission filter array and multispectral transmission filter structure

• Main Authors: LEE, WUI-PIN, LIM, SIN-HENG, RAHMAN, MD ABDUR, LAKSHMANAN CHETTIAR, SRINIVASAN, YANG, JOEL KWANG WEI, ZHENG, RUI-TAO
• Format: Patent
• Language: Chinese; English
• Published: 01.07.2024
• Subjects: MANUFACTURE OR TREATMENT OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; NANOTECHNOLOGY; OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS; OPTICS; PERFORMING OPERATIONS; PHYSICS; SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; TRANSPORTING

A method for manufacturing multiple optical filters with Fabry-Perot (F-P) cavity structures is provided. The method includes providing a carrier; disposing a first reflection layer on the carrier; disposing a first pattern optical layer and a second pattern optical layer on the surface of the first reflection layer; the first pattern optical layer includes a plurality of first nanostructures and a second pattern optical layer includes a plurality of second nanostructures; reflowing the first pattern optical film layer and the second pattern optical film layer to form a first film layer and a second film layer; and coating a second reflection layer on the first film layer and the second film layer. The invention also provides a multispectral transmission filter array and a multispectral transmission filter structure.