Modular vapor delivery system for semiconductor process tools

• Main Authors: EDMONDSON, BRYCE ISAIAH, JONES, CHRISTOPHER MATTHEW, DURBIN, AARON, BAMFORD, THADEOUS, ABEL, JOSEPH R, STUMPF, JOHN FOLDEN, LEMAIRE, PAUL C
• Format: Patent
• Language: Chinese; English
• Published: 16.06.2024
• Subjects: CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

A modular vapor delivery system comprising a flow control component module that comprises a first inlet port and a second inlet port, a liquid flow controller coupled to an outlet port of the flow control component module, and a vaporizer module coupled to an outlet port of the liquid flow controller.