Single-photon detector, single-photon detector array, and method for forming the same
The invention provides a single-photon detector that includes a superconducting wire made from a high quality and uniform superconducting film with a higher critical temperature. A reflector or a multilayered reflector with high reflectivity, preferably a nitride-based distributed Bragg reflector, i...
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Main Authors | , |
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Format | Patent |
Language | Chinese English |
Published |
01.05.2024
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Subjects | |
Online Access | Get full text |
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Summary: | The invention provides a single-photon detector that includes a superconducting wire made from a high quality and uniform superconducting film with a higher critical temperature. A reflector or a multilayered reflector with high reflectivity, preferably a nitride-based distributed Bragg reflector, is provided to reflect an incident light to the superconducting wire. A surface-plasmon wavelength-selective surface may be further provided above the superconducting wire to resonantly transmits the incident light within a selective passband, making the single-photon detector operable in the ultraviolet, visible, and infrared wavelength bands. In addition, a large area of superconducting film with high level of uniformity is grown to achieve the up scaling of the single-photon detector and a single-photon detector array. |
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Bibliography: | Application Number: TW202312122816 |