Load port

A load port comprises: a plate-shaped base member; a door member; a linkage mechanism including a linking member; a guiding roller moving with the door member; a guiding surface curvedly extending from a first direction to a second direction and configured to guide a guiding roller; a driving member...

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Bibliographic Details
Main Authors OGAWA, TATSURU, KOGISO, SHINPEI, SUZUKI, ATSUSHI, ISHIHARA, YUKI, MATSUMOTO, YUKI, MIURA, TATSUYA
Format Patent
LanguageChinese
English
Published 01.05.2024
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Summary:A load port comprises: a plate-shaped base member; a door member; a linkage mechanism including a linking member; a guiding roller moving with the door member; a guiding surface curvedly extending from a first direction to a second direction and configured to guide a guiding roller; a driving member rotatably connected to another end of the linking member; and a driving device driving the driving member to move in the second direction. The linkage mechanism is constructed to allow the guiding roller to move along the guiding surface from the first direction to the second direction or from the second direction to the first direction while another end of the linking member moves in the second direction. A pressing device is disposed to press the guiding roller when the guiding roller passes a guiding connecting portion connecting a first guiding surface extending along the first direction and a second guiding surface extending along the second direction.
Bibliography:Application Number: TW202312141099