Device for cleaning pot-shaped hollow bodies, in particular of transport containers for semiconductor wafers or for lithography masks

The present invention relates to a device (10) for cleaning pot-shaped hollow bodies (12), in particular transport containers (30) for semiconductor wafers or for lithography masks, wherein the hollow body (12) comprises a base wall (32) and one or more side walls (34) that form an inner hollow body...

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Bibliographic Details
Main Author SCHIENLE, FRANK
Format Patent
LanguageChinese
English
Published 01.05.2024
Subjects
CLEANING
CLEANING IN GENERAL
PERFORMING OPERATIONS
PREVENTION OF FOULING IN GENERAL
TRANSPORTING
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Summary:The present invention relates to a device (10) for cleaning pot-shaped hollow bodies (12), in particular transport containers (30) for semiconductor wafers or for lithography masks, wherein the hollow body (12) comprises a base wall (32) and one or more side walls (34) that form an inner hollow body surface (33) and an opening (36) that is disposed opposite the base wall (32) and that is surrounded by a marginal surface (38) of the side wall (34). The device (10) comprises a support wall (20) on which the marginal surface (389) of the hollow body (12) can be placed, a cleaning device (40) by which a first cleaning fluid for cleaning the inner hollow body surface (33) can be dispensed when the hollow body (12) is connected to the support wall (20) and a feed device (37) that is arranged in the support wall (20) or is fastened to the support wall(20) and by which a flushing fluid can be guided to the marginal surface (38), with the feed device (37) comprising a movable element (39) that is movable toward the ma
Bibliography:Application Number: TW202312124236