MEMS element

• Main Authors: YAMAMOTO, KEITA, FUKUTOME, TAKAO
• Format: Patent
• Language: Chinese; English
• Published: 01.04.2024
• Subjects: DEAF-AID SETS; ELECTRIC COMMUNICATION TECHNIQUE; ELECTRICITY; LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKEACOUSTIC ELECTROMECHANICAL TRANSDUCERS; MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES; MICROSTRUCTURAL TECHNOLOGY; PERFORMING OPERATIONS; PUBLIC ADDRESS SYSTEMS; TRANSPORTING

A MEMS element, wherein a backplate (7) containing a fixed electrode (5) and a vibrating membrane (3) containing a movable electrode are placed opposite each other on a substrate (1) provided with a back chamber (9) via spacer (4), wherein the vibrating membrane (3) is provided with a post (10) for linking to the backplate (7), and a post side slit (11) and an edge side slit (12), wherein a plurality of vibrating parts (13) are formed in the vibrating membrane (3), and wherein a plurality of fixed electrode parts (14) are placed opposite each of the plurality of vibrating parts (13). Amplitude in central part of the vibrating membrane (3) can be suppressed since the central part of vibrating film (3) is linked to backplate (7) through the post (10). Each of the plurality of vibrating parts is provided with the post side slit (11) in a joint side between the post (10) and the vibrating membrane (3), and the edge side slit (12) in the edge, whereby the difference of the amplitude amount between the central part