Analysis device, relationship data production method, analysis method, and analysis program

• Main Authors: HADA, MIYAKO, MINAMI, MASAKAZU, TAKAHASHI, MOTONOBU, SHIMIZU, TORU, SAKAGUCHI, YUHEI, FUJII, TETSUO
• Format: Patent
• Language: Chinese; English
• Published: 16.03.2024
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; PHYSICS; SEMICONDUCTOR DEVICES; TESTING

The present invention is aimed to perform precise monitoring of the processed amount by which a workpiece is processed, and includes a measurement unit that measures a concentration or a partial pressure of a reaction product generated while the workpiece is being processed, and an operation unit that calculates the processed amount of the workpiece using an output value of the measurement unit. The measurement unit includes: a laser light source; a photodetector; and a signal processing unit. The operation unit includes a time integration unit; a relationship data storage unit that stores therein relationship data indicating a relationship between the time integral of integrating an output value of the measurement unit with respect to time, and a processed amount by which a workpiece is processed; and a processed amount calculation unit that calculates a processed amount by which the workpiece is processed, from the time integral obtained by the time integration unit and the relationship data.