Holding device

• Main Authors: USUI, SHUN, OTA, SUMIO, SANARI, TAKUMI, INOUE, SHIRO, OHARA, HONAMI
• Format: Patent
• Language: Chinese; English
• Published: 01.03.2024
• Subjects: ARTIFICIAL STONE; BASIC ELECTRIC ELEMENTS; CEMENTS; CERAMICS; CHEMISTRY; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDINGMATERIALS; CONCRETE; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; LIME, MAGNESIA; METALLURGY; REFRACTORIES; SEMICONDUCTOR DEVICES; SLAG; TREATMENT OF NATURAL STONE

A holding device 100 according to the present invention is provided with a ceramic substrate 10 which comprises: a plate-like member 11 that is mainly composed of a ceramic and has a first surface S1 that holds an object W; and a gas flow channel 12 which is formed inside the plate-like member 11. With respect to this holding device 100, the gas flow channel 12 has, in a part thereof, a porous region R in which a gas-permeable porous body 70 that is mainly composed of a ceramic and comprises a plurality of pores 71 is arranged; the porous body 70 comprises, as the pores 71, a plurality of large-diameter pores 71a that have a median diameter of more than 20 [mu]m but not more than 55 [mu]m, and a plurality of small-diameter pores 71b that have a median diameter of 3 [mu]m to 20 [mu]m; and the volume proportion of the large-diameter pores 71a contained in the porous body 70 is higher than the volume proportion of the small-diameter pores 71b contained in the porous body 70.