Cleaning composition for adhesives

One embodiment of the present invention provides a cleaning composition for adhesives, the cleaning composition exhibiting excellent removability of adhesives. One embodiment of the present disclosure relates to a cleaning composition for removing an adhesive that remains on a wafer. This cleaning c...

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Bibliographic Details
Main Author YAMADA, KOUHEI
Format Patent
LanguageChinese
English
Published 16.02.2024
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Summary:One embodiment of the present invention provides a cleaning composition for adhesives, the cleaning composition exhibiting excellent removability of adhesives. One embodiment of the present disclosure relates to a cleaning composition for removing an adhesive that remains on a wafer. This cleaning composition for adhesives contains an organic solvent (component A) and a surfactant (component B); the component B is composed of at least one surfactant that is selected from among fluorine-based surfactants and silicone-based surfactants; the content of the component A is 90% by mass to 99.97% by mass; and the content of the component B is 0.03% by mass to 5% by mass.
Bibliography:Application Number: TW202312119722