Method for manufacturing sample, and method for observing sample

• Main Authors: SUEHIRO, SHOGO, SAITO, TOMOHIRO, MAIE, MAKOTO
• Format: Patent
• Language: Chinese; English
• Published: 16.01.2024
• Subjects: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; PHYSICS; TESTING

The present invention addresses the problem of providing a method for manufacturing a sample with which damage to the sample can be reduced when performing observations using an X-ray microscope, and a technology relating thereto. The method for manufacturing a sample according to one aspect of the present invention is for manufacturing a sample used for observation carried out using an X-ray microscope and comprises a first processing step of forming a layer of a metal compound by attaching the metal compound in a gaseous form on the surface of a material (S) used to manufacture the sample and a second processing step of forming a layer of metal oxide or metal from the layer of the metal compound by reacting the metal compound with an oxidizing agent in a gaseous form and the material contains a first component the observation precision of which decreases or which deforms as the time elapses upon reception of the X-rays of the X-ray microscope.