Dust collection method that enables a more stable and effective collection of particles

• Main Authors: TAKAGI, DAI, OHNO, TETSUHIRO, OZAKI, MOE
• Format: Patent
• Language: Chinese; English
• Published: 16.01.2024
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLIDMATERIALS OR FLUIDS; MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROMSOLID MATERIALS OR FLUIDS; PERFORMING OPERATIONS; SEMICONDUCTOR DEVICES; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS; SEPARATION OF SOLID MATERIALS USING LIQUIDS OR USING PNEUMATICTABLES OR JIGS; TRANSPORTING

The objective is to provide a dust collection method that stably collects particles within a vacuum chamber. The method involves using an object at least covered with an insulating material, designated as a dust-collecting conveying object (Gs). The surface of the dust-collecting conveying object is charged positively or negatively in the atmospheric environment by means of an ionizer. At this point, the charged potential is set lower than the discharge initiation potential determined according to Paschen's law (charged engineering). The dust-collecting conveying object in the charged state is then transported into a vacuum chamber (Lc, Pc1~Pc3), and particles existing inside the vacuum chamber are allowed to adhere to the dust-collecting conveying object (dust collection engineering). This dust collection method is designed for collecting particles within a vacuum treatment chamber in a vacuum processing apparatus. The vacuum processing apparatus includes a loading and locking chamber and the aforementioned