Residual gas analyser

Disclosed herein is a residual gas analyser, RGA, for determining the amounts of gas components in a vacuum tool, the RGA comprising a first detector and a second detector, wherein:the first detector is configured so that the largest gas component amount that is determinable by the first detector is...

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Bibliographic Details
Main Authors MONDT, EVA, VAN DEN BRINK, JEROEN AALT
Format Patent
LanguageChinese
English
Published 01.01.2024
Subjects
APPARATUS SPECIALLY ADAPTED THEREFOR
BASIC ELECTRIC ELEMENTS
CINEMATOGRAPHY
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
ELECTROGRAPHY
HOLOGRAPHY
MATERIALS THEREFOR
ORIGINALS THEREFOR
PHOTOGRAPHY
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES
PHYSICS
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Summary:Disclosed herein is a residual gas analyser, RGA, for determining the amounts of gas components in a vacuum tool, the RGA comprising a first detector and a second detector, wherein:the first detector is configured so that the largest gas component amount that is determinable by the first detector is greater than the largest gas component amount that is determinable by the second detector; the first detector is configured so that the smallest gas component amount that is determinable by the first detector is less than or equal to the largest gas component amount that is determinable by the second detector; and the second detector is configured so that the smallest gas component amount that is determinable by the second detector is less than the smallest gas component amount that is determinable by the first detector.
Bibliography:Application Number: TW202312107715