Wafer transfer apparatus and wafer transfer method

The invention provides a wafer carrying apparatus. The wafer carrying apparatus comprises a first supporting mechanism, a second supporting mechanism, a first taking and conveying mechanism and a second taking and conveying mechanism; the first supporting mechanism and the second supporting mechanis...

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Bibliographic Details
Main Authors WU, TIAN-YAO, CHEN, XING-LONG, MIAO, TAO, WANG, HAO
Format Patent
LanguageChinese
English
Published 16.12.2023
Subjects
BASIC ELECTRIC ELEMENTS
CONVEYING
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
HANDLING THIN OR FILAMENTARY MATERIAL
PACKING
PERFORMING OPERATIONS
PNEUMATIC TUBE CONVEYORS
SEMICONDUCTOR DEVICES
SHOP CONVEYOR SYSTEMS
STORING
TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING
TRANSPORTING
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Summary:The invention provides a wafer carrying apparatus. The wafer carrying apparatus comprises a first supporting mechanism, a second supporting mechanism, a first taking and conveying mechanism and a second taking and conveying mechanism; the first supporting mechanism and the second supporting mechanism are arranged side by side in a translation direction. The two opposite outer side walls of the first supporting mechanism and the second supporting mechanism are each provided with a taking and conveying guide structure in the telescopic direction perpendicular to the translation direction. The first taking and conveying mechanism and the second taking and conveying mechanism are movably arranged on the taking and conveying guide structure of the first supporting mechanism and the taking and conveying guide structure of the second supporting mechanism respectively; and each of the first taking and conveying mechanism and the second taking and conveying mechanism comprises a tail end execution part, and the tail e
Bibliography:Application Number: TW202312127441