Semiconductor device and manufacturing method thereof
A semiconductor device and a manufacturing method thereof are provided. The manufacturing method includes steps of: depositing an N-drift layer on a substrate, conducting an ion implant process on the N-drift layer to form a plurality of P-type pillars, depositing a N-type epitaxial layer on the P-t...
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Main Authors | , , |
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Format | Patent |
Language | Chinese English |
Published |
01.12.2023
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Subjects | |
Online Access | Get full text |
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Summary: | A semiconductor device and a manufacturing method thereof are provided. The manufacturing method includes steps of: depositing an N-drift layer on a substrate, conducting an ion implant process on the N-drift layer to form a plurality of P-type pillars, depositing a N-type epitaxial layer on the P-type pillars, conducting an ion implant process on the N-type epitaxial layer to form a first P-type epitaxial layer and at least one localized P region, conducting a field oxidation to the first P-type epitaxial layer to form a second P-type epitaxial layer, and forming a field oxide layer on the first P-type epitaxial layer and the N-type epitaxial layer. The localized P region passes though the N-type epitaxial layer to the field oxide layer. |
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Bibliography: | Application Number: TW202211126627 |