Wafer transfer apparatus and wafer transfer method

• Main Authors: WU, TIAN-YAO, CHEN, XING-LONG, MIAO, TAO, WANG, HAO
• Format: Patent
• Language: Chinese; English
• Published: 01.12.2023
• Subjects: BASIC ELECTRIC ELEMENTS; CONVEYING; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; HANDLING THIN OR FILAMENTARY MATERIAL; PACKING; PERFORMING OPERATIONS; PNEUMATIC TUBE CONVEYORS; SEMICONDUCTOR DEVICES; SHOP CONVEYOR SYSTEMS; STORING; TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING; TRANSPORTING

The invention provides a wafer carrying apparatus. The wafer carrying apparatus comprises a first supporting mechanism, a second supporting mechanism, a first taking and conveying mechanism and a second taking and conveying mechanism; the first supporting mechanism and the second supporting mechanis...