Wafer transfer apparatus and wafer transfer method
The invention provides a wafer carrying apparatus. The wafer carrying apparatus comprises a first supporting mechanism, a second supporting mechanism, a first taking and conveying mechanism and a second taking and conveying mechanism; the first supporting mechanism and the second supporting mechanis...
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Main Authors | , , , |
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Format | Patent |
Language | Chinese English |
Published |
01.12.2023
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Subjects | |
Online Access | Get full text |
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Summary: | The invention provides a wafer carrying apparatus. The wafer carrying apparatus comprises a first supporting mechanism, a second supporting mechanism, a first taking and conveying mechanism and a second taking and conveying mechanism; the first supporting mechanism and the second supporting mechanism are arranged side by side in a translation direction. The two opposite outer side walls of the first supporting mechanism and the second supporting mechanism are each provided with a taking and conveying guide structure in the telescopic direction perpendicular to the translation direction. The first taking and conveying mechanism and the second taking and conveying mechanism are movably arranged on the taking and conveying guide structure of the first supporting mechanism and the taking and conveying guide structure of the second supporting mechanism respectively; and each of the first taking and conveying mechanism and the second taking and conveying mechanism comprises a tail end execution part, and the tail e |
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Bibliography: | Application Number: TW202312127440 |