Wafer carrying device and wafer carrying method

The invention provides a wafer carrying device. The wafer carrying device comprises a first supporting mechanism and a second supporting mechanism, with taking and conveying guide structures on the outer side walls thereof. The wafer carrying device further comprises a first taking and conveying mec...

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Bibliographic Details
Main Authors WU, TIAN-YAO, CHEN, XING-LONG, MIAO, TAO, WANG, HAO
Format Patent
LanguageChinese
English
Published 01.12.2023
Subjects
BASIC ELECTRIC ELEMENTS
CONVEYING
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
HANDLING THIN OR FILAMENTARY MATERIAL
PACKING
PERFORMING OPERATIONS
PNEUMATIC TUBE CONVEYORS
SEMICONDUCTOR DEVICES
SHOP CONVEYOR SYSTEMS
STORING
TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING
TRANSPORTING
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Summary:The invention provides a wafer carrying device. The wafer carrying device comprises a first supporting mechanism and a second supporting mechanism, with taking and conveying guide structures on the outer side walls thereof. The wafer carrying device further comprises a first taking and conveying mechanism and a second taking and conveying mechanism, which are movably arranged on the taking and conveying guide structure of the first supporting mechanism and the taking and conveying guide structure of the second supporting mechanism respectively. The first taking and conveying mechanism and the second taking and conveying mechanism comprise tail end execution parts facing opposite directions. The wafer carrying device further comprises a rotating mechanism and a rotating driving part. The first supporting mechanism and the second supporting mechanism are fixedly arranged on the rotating mechanism. The rotating driving part drives the rotating mechanism to rotate, and then at least one of the first supporting me
Bibliography:Application Number: TW202312127439