Protection tape and manufacturing method of semiconductor device
A protection tape includes a first substrate layer, an adhesive layer and a shrinkage layer. The shrinkage layer is located between the first substrate layer and the adhesive layer. The thermal expansion coefficient of the shrinkage layer at 180 DEG C is larger than or equal to 30 [mu]m/m DEG C and...
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Main Authors | , , , , , |
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Format | Patent |
Language | Chinese English |
Published |
16.11.2023
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Subjects | |
Online Access | Get full text |
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