Dry process tool with adjustable flow valve
A system for a dry process tool comprises one or more processing chambers, two or more processing stations being positioned within the one or more processing chambers; and a first gas source. A common manifold is coupled to the first gas source via at least a first mass flow controller. The common m...
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Main Authors | , , |
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Format | Patent |
Language | Chinese English |
Published |
16.10.2023
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Subjects | |
Online Access | Get full text |
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Summary: | A system for a dry process tool comprises one or more processing chambers, two or more processing stations being positioned within the one or more processing chambers; and a first gas source. A common manifold is coupled to the first gas source via at least a first mass flow controller. The common manifold fluidly couples the first gas source to each processing station of the two or more processing stations via a corresponding flow path. Each corresponding flow path comprises an adjustable flow valve. |
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Bibliography: | Application Number: TW202211144334 |