Aluminum scandium nitride film and ferroelectric element

An aluminum scandium nitride film according to the present invention contains aluminum, scandium and nitrogen, while additionally containing gallium. The crystal phase of this aluminum scandium nitride film may include a hexagonal crystal. The crystal phase of this aluminum scandium nitride film may...

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Main Authors SHIRAISHI, TAKAHISA, KUSUSE, YOSHIRO, MIZUTANI, RYOICHI, OTA, REIKA, MESUDA, MASAMI, YASUOKA, SHINNOSUKE, IIHAMA, JUNYA, SUEMOTO, YUYA, UEOKA, YOSHIHIRO, FUNAKUBO, HIROSHI
Format Patent
LanguageChinese
English
Published 16.10.2023
Subjects
ARTIFICIAL STONE
CEMENTS
CERAMICS
CHEMISTRY
COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDINGMATERIALS
CONCRETE
LIME, MAGNESIA
METALLURGY
REFRACTORIES
SLAG
TREATMENT OF NATURAL STONE
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Summary:An aluminum scandium nitride film according to the present invention contains aluminum, scandium and nitrogen, while additionally containing gallium. The crystal phase of this aluminum scandium nitride film may include a hexagonal crystal. The crystal phase of this aluminum scandium nitride film may have a wurtzite structure.
Bibliography:Application Number: TW202312112220