Semiconductor structures and methods of formation
Various back end of line (BEOL) layer formation techniques described herein enable reduced contact resistance, reduced surface roughness, and/or increased semiconductor device performance for BEOL layers such as interconnects and/or metallization layers.
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Main Authors | , , , , , , , |
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Format | Patent |
Language | Chinese English |
Published |
01.10.2023
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Subjects | |
Online Access | Get full text |
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Summary: | Various back end of line (BEOL) layer formation techniques described herein enable reduced contact resistance, reduced surface roughness, and/or increased semiconductor device performance for BEOL layers such as interconnects and/or metallization layers. |
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Bibliography: | Application Number: TW202312100354 |