MEMS element

A MEMS element, wherein a backplate (7) containing a fixed electrode (5) and a vibrating membrane (3) containing a movable electrode are placed opposite each other on a substrate (1) provided with a back chamber (9) via spacer (4), wherein the vibrating membrane (3) is provided with a post (11) for...

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Bibliographic Details
Main Author FUKUTOME, TAKAO
Format Patent
LanguageChinese
English
Published 01.09.2023
Subjects
DEAF-AID SETS
ELECTRIC COMMUNICATION TECHNIQUE
ELECTRICITY
LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKEACOUSTIC ELECTROMECHANICAL TRANSDUCERS
MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES
MICROSTRUCTURAL TECHNOLOGY
PERFORMING OPERATIONS
PUBLIC ADDRESS SYSTEMS
TRANSPORTING
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Summary:A MEMS element, wherein a backplate (7) containing a fixed electrode (5) and a vibrating membrane (3) containing a movable electrode are placed opposite each other on a substrate (1) provided with a back chamber (9) via spacer (4), wherein the vibrating membrane (3) is provided with a post (11) for linking to the backplate (7), and a post side slit (12) and an edge side slit (13), and wherein a plurality of vibrating parts (14) are formed in the vibrating membrane (3). Amplitude in central part of the vibrating membrane (3) can be suppressed since the central part of vibrating film (3) is linked to backplate (7) through the post (11). Each of the plurality of vibrating parts is provided with the post side slit (12) in a joint side between the post (11) and the vibrating membrane (3), and the edge side slit (13) in the edge, whereby the difference of the amplitude amount between the central part and the edge part of the vibrating membrane (3) becomes to be reduced.
Bibliography:Application Number: TW202211122998