Systems and methods for tuning an impedance matching network in a step-wise fashion
Systems and methods for tuning an impedance matching network in a step-wise fashion are described. By tuning the impedance matching network in a step-wise fashion instead of directly to achieve optimum values of a radio frequency (RF) and a combined variable capacitance, processing of a wafer using...
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Main Authors | , , , |
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Format | Patent |
Language | Chinese English |
Published |
16.08.2023
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Subjects | |
Online Access | Get full text |
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Summary: | Systems and methods for tuning an impedance matching network in a step-wise fashion are described. By tuning the impedance matching network in a step-wise fashion instead of directly to achieve optimum values of a radio frequency (RF) and a combined variable capacitance, processing of a wafer using the tuned optimal values becomes feasible. |
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Bibliography: | Application Number: TW202312116255 |